DocumentCode
1732514
Title
Tensile Testing Of Epitaxial Silicon Films
Author
Cunningham, Shawn J. ; Suwito, Wan ; Read, David T.
Author_Institution
Ford Microelectronics Inc.
Volume
2
fYear
1995
Firstpage
96
Lastpage
99
Keywords
Force measurement; Poisson equations; Semiconductor films; Semiconductor process modeling; Silicon; Strain measurement; Structural beams; Tensile stress; Testing; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721753
Filename
721753
Link To Document