DocumentCode

1732790

Title

Microfabricated High Energy Particle Detector

Author

Han, J. ; Smith, R.L. ; Lander, Richard

Author_Institution

Dept. of Physics, U.C. Davis

Volume

2

fYear

1995

Firstpage

148

Lastpage

151

Keywords

Anodes; Argon; Cathodes; Electrons; Etching; Ionization; Radiation detectors; Silicon; Substrates; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721766

Filename

721766