A Novel Low Field Electron Emission Polyerystalline Diamond Microtip Arrays For Sensor Applications

Author

Kang, W.P. ; Davidson, Jennifer L. ; Li, Q. ; Xu, J.F. ; Kinser, D.L. ; Kerns, D.V.

Author_Institution

Depts. of Applied & Engineering Sciences, and Electrical & Computer Engineering, Vanderbilt Univ

Volume

fYear

1995

Firstpage

182

Lastpage

185

Keywords

Application software; Diodes; Electron emission; Fabrication; Micromachining; Microsensors; Sensor arrays; Silicon; Substrates; Tactile sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

DOI

10.1109/SENSOR.1995.721775

Filename

721775

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