DocumentCode
1733049
Title
Properties Of Heteroepitaxial 3c-SiC Films Grown by LPCVD
Author
Yamaguchi, Yoh-ichi ; Nagasawa, Hiroyuki ; Shoki, Tsutomu ; Annaka, Norimichi
Author_Institution
HOYA Corporation
Volume
2
fYear
1995
Firstpage
190
Lastpage
193
Keywords
Biomembranes; Crystallization; Grain size; Internal stresses; Optical films; Optical sensors; Semiconductor films; Silicon carbide; Stress measurement; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location
Stockholm, Sweden
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721777
Filename
721777
Link To Document