DocumentCode

1734105

Title

Micro Coils Fabricated By UV Depth Lithography And Galvanoplating

Author

Löchel, B. ; Maciossek, A. ; Rothe, M. ; Windbracke, W.

Author_Institution

Fraunhofer-Institut fur Siliziumtechnologie

Volume

2

fYear

1995

Firstpage

264

Lastpage

267

Keywords

Coatings; Coils; Fabrication; Galvanizing; Lithography; Magnetic heads; Micromachining; Printing; Resists; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721796

Filename

721796