Batch-fabricated high dense multi sliders for WDM spectral attenuation

Author

Konishi, S. ; Oshima, A. ; Kinoshita, N. ; Kumagaya, I. ; Kishi, T. ; Shimazu, T. ; Katayama, M.

Author_Institution

Dept. of Micro Syst. Technol., Ritsumeikan Univ., Kyoto, Japan

Volume

2

fYear

2005

Firstpage

1242

Abstract

This paper reports MEMS based mechanical dynamic gain equalizer (hereafter DGEQ) which is expected to equalize the nonuniformities of spectral intensity in WDM transportation. Batch-fabricated multisliders for DGEQ are presented as our continuous research on optical application of electrostatic controlled linear inchworm actuator (hereafter ECLIA). 16 multisliders (600 μm wide) corresponding to 16 channels are fabricated by DRIE and bonded on a pyrex glass substrate for a reliable electrical isolation. Operating of developed multisliders and their optical attenuation as DGEQ will be reported in succession to design and fabrication of device.

Keywords

batch processing (industrial); electrostatic actuators; equalisers; isolation technology; micro-optics; micromechanical devices; optical attenuators; optical communication equipment; optical wavelength conversion; DRIE; WDM spectral attenuation; WDM transportation; dynamic gain equalizer; electrical isolation; electrostatic controlled linear inchworm actuator; multisliders; optical MEMS; optical attenuation; spectral intensity; Attenuation; Bonding; Electrostatic actuators; Equalizers; Hydraulic actuators; Micromechanical devices; Optical attenuators; Optical control; Transportation; Wavelength division multiplexing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1497304

Filename

1497304