• DocumentCode
    1739939
  • Title

    Direct nanoprinting technology and its application to nanostructure fabrication

  • Author

    Yokoo, A. ; Nakao, M. ; Masuda, H. ; Tamamura, T.

  • Author_Institution
    NTT Basic Res. Labs., Tokyo, Japan
  • Volume
    2
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    417
  • Abstract
    We have described direct nanoprinting technology and its application in the fabrication of an aluminum nanohole array and recording media. Using the replication technique presented here, it will be possible to fabricate nanostructures efficiently and economically in the future
  • Keywords
    aluminium; electron beam lithography; etching; nanotechnology; optical disc storage; optical fabrication; Al; aluminum nanohole array fabrication; direct nanoprinting technology; nanostructure fabrication; recording media; replication technique; Aluminum; Artificial intelligence; Fabrication; Glass; Image storage; Lithography; Oxidation; Printing; Silicon carbide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society 2000 Annual Meeting. LEOS 2000. 13th Annual Meeting. IEEE
  • Conference_Location
    Rio Grande
  • ISSN
    1092-8081
  • Print_ISBN
    0-7803-5947-X
  • Type

    conf

  • DOI
    10.1109/LEOS.2000.893890
  • Filename
    893890
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1739939