DocumentCode
1745411
Title
Comparison of the performance of flexural plate wave and surface acoustic wave devices as the detector in a gas chromatograph
Author
Black, Justin P. ; Chen, Bryan ; Quinn, Richard ; Madou, Marc ; White, Richard M.
Author_Institution
Berkeley Sensor & Actuator Center, California Univ., Berkeley, CA, USA
Volume
1
fYear
2000
fDate
36800
Firstpage
435
Abstract
The sensitivity to chemical vapors of the flexural plate wave (FPW) device is compared to that of a 250 MHz surface acoustic wave (SAW) detector available with the MSI-301 Gas Chromatograph. The sensitivity of uncoated devices, and devices coated with the polymeric adsorbents polyisobutylene and polybutadiene, were compared using three vapors-methanol (CH3OH), nitrous oxide (N2O), and helium (He). Both the SAW and FPW sensor responses were linearly proportional to concentration with concentration. The FPW is shown to be more sensitive than the SAW for all three vapors, regardless of coating. The minimal detectable concentrations for methanol, N2O and He were 75 ppm, 80 ppm, and 250 ppm respectively, for the FPW, and 535 ppm, 2500 ppm, and greater than 10000 ppm for the SAW. The relatively high sensitivity of the FPW is attributed to its response to both mass loading and changes in gas density
Keywords
chromatography; gas sensors; surface acoustic wave sensors; 250 MHz; FPW sensor; He; N2O; SAW sensor; chemical vapor sensitivity; flexural plate wave device; gas chromatography; gas detector; helium; methanol; nitrous oxide; polybutadiene; polyisobutylene; polymeric adsorbent coating; surface acoustic wave device; Acoustic signal detection; Acoustic waves; Chemicals; Coatings; Detectors; Helium; Polymer films; Surface acoustic wave devices; Surface acoustic waves; Surface waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2000 IEEE
Conference_Location
San Juan
ISSN
1051-0117
Print_ISBN
0-7803-6365-5
Type
conf
DOI
10.1109/ULTSYM.2000.922588
Filename
922588
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