DocumentCode
1749135
Title
Influence of dielectrical layer thickness in gage factor of pressure sensor
Author
Tanyushin, Eugene Yu ; Gridchin, Victor A.
Author_Institution
Dept. of Semicond. Devices & Microelectron., NSTU, Novosibirsk, Russia
fYear
2001
fDate
2001
Firstpage
26
Lastpage
27
Abstract
The dependence of gage factor on single-line sizes of resistors and thickness of dielectrical layer has been explored. Transfer constant of deformation from the substrate to resistive-strain sensor through dielectrical layer has been calculated
Keywords
pressure sensors; strain sensors; deformation transfer constant; dielectric layer thickness; gauge factor; pressure sensor; resistor size; strain sensor; Biomembranes; Circuits; Dielectric substrates; Dielectrics and electrical insulation; Gas detectors; Mechanical sensors; Resistors; Silicon compounds; Temperature distribution; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials, 2001. Proceedings. 2nd Annual Siberian Russian Student Workshop on
Conference_Location
Erlagol, Altai
Print_ISBN
5-7782-0347-0
Type
conf
DOI
10.1109/SREDM.2001.939135
Filename
939135
Link To Document