• DocumentCode
    1765498
  • Title

    Method of Fabrication for Encapsulated Polarizing Resonant Gratings

  • Author

    Pung, Aaron J. ; Carl, Scott R. ; Srimathi, Indumathi Raghu ; Johnson, Eric G.

  • Author_Institution
    Holcombe Dept. of Electr. & Comput. Eng., Clemson Univ., Clemson, SC, USA
  • Volume
    25
  • Issue
    15
  • fYear
    2013
  • fDate
    Aug.1, 2013
  • Firstpage
    1432
  • Lastpage
    1434
  • Abstract
    In this letter, we present a novel method of fabricating encapsulated resonant gratings. The fabrication method uses selective etching, conformal deposition, conventional lithography, and direct bonding techniques. Our letter includes simulation and experimental results, confirming a strong resonance unique to the TE polarization at 1550 nm with a 5 nm full-width at half-maximum.
  • Keywords
    bonding processes; diffraction gratings; encapsulation; etching; light polarisation; optical fabrication; photolithography; TE polarization; conformal deposition; conventional lithography; direct bonding techniques; encapsulated polarizing resonant gratings; full-width at half-maximum; resonance; selective etching; wavelength 1550 nm; Resonant gratings; optical components; optical waveguide filters;
  • fLanguage
    English
  • Journal_Title
    Photonics Technology Letters, IEEE
  • Publisher
    ieee
  • ISSN
    1041-1135
  • Type

    jour

  • DOI
    10.1109/LPT.2013.2266575
  • Filename
    6530695
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1765498