A 16 Channel High-Voltage Driver with 14 Bit Resolution for Driving Piezoelectric Actuators

A high-voltage, 16 channel driver with a maximum voltage of 72 volt and 14 bit resolution in a high-voltage CMOS (HV-CMOS) process is presented. This design incorporates a 14 bit monotonic by design DAC together with a high-voltage complementary class AB output stage for each channel. All 16 channels are used for driving a piezoelectric actuator within the control loop of a micropositioning system. Since the output voltages are static most of the time, a class AB amplifier is used, implementing voltage feedback to achieve 14 bit accuracy. The output driver consists of a push-pull stage with a built-in output current limitation and high-impedance mode. Also a protection circuit is added which limits the internal current when the output voltage saturates against the high-voltage rail. The 14 bit resolution of each channel is generated with a segmented resistor string DAC which assures monotonic by design behavior by using leapfrogging of the buffers used between segments. A diagonal shuffle layout is used for the resistor strings leading to cancellation of first order process gradients. The dense integration of 16 channels with high peak currents results in crosstalk, countered in this design by using staggered switching and resampling of the output voltages.