DocumentCode
1769575
Title
Enhanced plasmonic performance in ultrathin silver structures using Gas Cluster Ion Beam Irradiation
Author
Ee Jin Teo ; Toyoda, Noriaki ; Chengyuan Yang ; Bing Wang ; Nan Zhang ; Bettiol, Andrew Anthony ; Jing Hua Teng
Author_Institution
Inst. of Mater. Res. & Eng., Agency for Sci., Technol. & Res. (A*STAR), Singapore, Singapore
fYear
2014
fDate
8-13 June 2014
Firstpage
1
Lastpage
2
Abstract
We demonstrate the use of Gas Cluster Ion Beam (GCIB) nanoprocessing technology for producing ultrathin silver waveguide and disk structures with smoother surfaces and wider grain sizes for enhanced surface plasmon propagation.
Keywords
grain size; ion beam effects; metallic thin films; optical films; optical waveguides; silver; surface plasmons; Ag; GCIB; disk structures; enhanced plasmonic performance; enhanced surface plasmon propagation; gas cluster ion beam irradiation; grain size; nanoprocessing technology; smoother surfaces; ultrathin silver structures; ultrathin silver waveguide; Films; Optical surface waves; Plasmons; Rough surfaces; Surface morphology; Surface roughness; Surface waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6988421
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