DocumentCode
1771375
Title
Integrated silicon optomechanical transducers and their application in atomic force microscopy
Author
Jie Zou ; Houxun Miao ; Michels, Thomas ; Aksyuk, Vladimir
Author_Institution
Center for Nanoscale Sci. & Technol., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
fYear
2014
fDate
8-13 June 2014
Firstpage
1
Lastpage
2
Abstract
We present integrated optomechanical transducers with exposed tips and demonstrate ultrahigh force sensitivity and large bandwidth. The transducer is implemented as an atomic force microscope probe in the contact mode and nanoscale resolution is demonstrated.
Keywords
atomic force microscopy; fibre optic sensors; integrated optics; optical fibre couplers; silicon; transducers; atomic force microscope probe; contact mode; exposed tips; integrated silicon optomechanical transducers; nanoscale resolution; ultrahigh force sensitivity; Cavity resonators; Force; Nanoscale devices; Optical sensors; Probes; Surface topography; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6989401
Link To Document