DocumentCode
1771864
Title
Photonic crystal cavities in cubic silicon carbide
Author
Radulaski, Marina ; Buckley, Sonia ; Zhang, Leiqi ; Rundquist, Armand ; Babinec, Thomas M. ; Provine, J. ; Alassaad, Kassem ; Ferro, Gabriel ; Vuckovic, Jelena
Author_Institution
E.L. Ginzton Lab., Stanford Univ., Stanford, CA, USA
fYear
2014
fDate
8-13 June 2014
Firstpage
1
Lastpage
2
Abstract
We present high quality factor (Q ~ 103) photonic crystal cavities in cubic silicon carbide (3C-SiC) films grown directly on silicon. We show results in shifted-L3 and nanobeam cavity geometries for applications in nonlinear and quantum photonics.
Keywords
Q-factor; nanophotonics; photonic crystals; semiconductor thin films; silicon compounds; wide band gap semiconductors; Si; SiC; cubic silicon carbide films; high quality factor photonic crystal cavity; nanobeam cavity geometry; nonlinear photonics; quantum photonics; shifted-L3 cavity geometry; Cavity resonators; Nonlinear optics; Optical device fabrication; Optical imaging; Photonic crystals; Q-factor; Silicon carbide;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6989645
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