Design and simulation of PDMS-Si machined micro-liquid flow sensor

In order to fulfill flow control of liquid sample caused by the microfluidic biochip, realize the miniaturization and integration of the microfluidic biochip, this paper proposed a research on the micro-liquid flow sensor. Based on the principle of thermal distribution, the micro flow sensor fabricated in this paper was composed of a sensor chip and a micro-channel chip. The sensor chip consisted of a micro heater made by the Pt metallic film and 10 micro ambient sensors, two of which were used to detect the working temperature and the other eight were used to measure flow; the microchannel chip was made of PDMS by casting. ANSYS was employed to simulate and optimize the structural design of the micro-liquid flow sensor.