Monte Carlo modeling of stiffness of MEMS membrane

Author

Kosobutskyy, Petro ; Komarnutskyy, Mykhaylo ; Maj, Cezary ; Zajac, Piotr ; Szermer, Michal ; Zabierowski, Wojciech

Author_Institution

Dept. of Comput.-Aided Design Syst., Lviv Nat. Polytech. Univ., Lviv, Ukraine

fYear

2014

fDate

19-21 June 2014

Firstpage

97

Lastpage

100

Abstract

Simulation step is nowadays one of the crucial in the design process of the device. It allows estimating the device performance and reducing the cost of the fabrication process. It is also very useful in statistical approach. As technological process is not ideal and always produce some deviation from established parameters, the final device has variable performance. In this paper, the statistical approach using Monte Carlo modelling is presented in order to estimate the stiffness of a rectangular membrane of various length to width ratio.

Keywords

Monte Carlo methods; elastic constants; membranes; micromechanical devices; MEMS membrane stiffness; Monte Carlo modeling; membrane length-to-width ratio; microelectromechanical systems; rectangular membrane; simulation step; statistical approach; stiffness estimation; Biomembranes; Monte Carlo methods; Performance evaluation; Silicon; Springs; Standards; Stress; MEMS; Monte Carlo; membrane; stiffness;

fLanguage

English

Publisher

ieee

Conference_Titel

Mixed Design of Integrated Circuits & Systems (MIXDES), 2014 Proceedings of the 21st International Conference

Conference_Location

Lublin

Print_ISBN

978-83-63578-03-9

Type

conf

DOI

10.1109/MIXDES.2014.6872163

Filename

6872163