Design and properties of nanostructured thick-film structures for sensor microelectronics

Author

Klym, Halyna ; Hadzaman, Ivan ; Yurchak, Iryna

Author_Institution

Specialized Comput. Syst. Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine

fYear

2014

fDate

19-21 June 2014

Firstpage

363

Lastpage

366

Abstract

The temperature sensitive thick-film structures in different design of sensitive layers and separate temperature and humidity sensitive thick-film systems based on spinel-type NiMn₂O₄-CuMn₂O₄-MnCo₂O₄ manganites with p- and p⁺-types of electrical conductivity and insulating magnesium aluminate MgAl₂O₄ were prepared. Taking into account good properties of obtained elements, they can be applied for microelectronics application and as multifunctional integrated sensors for effective monitoring and control.

Keywords

copper compounds; electrical conductivity; insulating thin films; magnesium compounds; manganese compounds; nanostructured materials; nickel compounds; semiconductor thin films; sensors; MgAl₂O₄; NiMn₂O₄-CuMn₂O₄-MnCo₂O₄; electrical conductivity; insulating magnesium aluminate; microelectronics application; multifunctional integrated sensors; nanostructured thick-film structures; sensor microelectronics; spinel-type manganites; temperature sensitive thick-film structures; Ceramics; Humidity; Resistance; Temperature; Temperature measurement; Temperature sensors; Thick films; nanostructures; sensors; spinel; thick films;

fLanguage

English

Publisher

ieee

Conference_Titel

Mixed Design of Integrated Circuits & Systems (MIXDES), 2014 Proceedings of the 21st International Conference

Conference_Location

Lublin

Print_ISBN

978-83-63578-03-9

Type

conf

DOI

10.1109/MIXDES.2014.6872219

Filename

6872219