DocumentCode
1779479
Title
Carbon integrated optomechanical systems
Author
Pernice, Wolfram H. P.
Author_Institution
Inst. of Nanotechnol., Karlsruhe Inst. of Technol., Eggenstein-Leopoldshafen, Germany
fYear
2014
fDate
12-16 Oct. 2014
Firstpage
487
Lastpage
488
Abstract
I present an integrated optomechanical platform based on polycrystalline diamond thin films. Free-standing resonators with high mechanical quality factors are excited both with gradient optical forces and through electrostatic actuation.
Keywords
Q-factor; carbon; diamond; electrostatic actuators; integrated optics; optical resonators; thin films; C; carbon integrated optomechanical systems; electrostatic actuation; free-standing resonators; gradient optical forces; high mechanical quality factors; integrated optomechanical platform; polycrystalline diamond thin films; Diamonds; Optical device fabrication; Optical films; Optical interferometry; Optical resonators; Optical surface waves; Optical waveguides;
fLanguage
English
Publisher
ieee
Conference_Titel
Photonics Conference (IPC), 2014 IEEE
Conference_Location
San Diego, CA
Type
conf
DOI
10.1109/IPCon.2014.6995461
Filename
6995461
Link To Document