Love wave delay line devices with tenable temperature characteristics using SU-8 photoresist as guiding layer

Author

Xiao Xie ; Gui Chen ; Wen Wang ; Shi-tang He

Author_Institution

Dept. of Eng. Mech., Inst. of Acoust., Beijing, China

fYear

2014

fDate

Oct. 30 2014-Nov. 2 2014

Firstpage

394

Lastpage

396

Abstract

Temperature characteristics of SU-8 photoresist coated love wave devices are presented from 0 °C to 120 °C. Surface skimming bulk wave (SSBW) and love wave delay line devices were fabricated on the ST-90°X quartz substrate. Effects of SU-8 thickness on insertion loss and temperature range of near-zero temperature coefficient of frequency (TCF) are investigated. Love wave devices with -15.5dB to -22.4dB insertion loss and near zero TCF from 60 °C to 100°C are demonstrated in the 150MHz range.

Keywords

Love waves; bulk acoustic wave devices; photoresists; surface acoustic wave delay lines; Love wave delay line devices; SU-8 photoresist coated Love wave devices; SU-8 thickness effects; SiO₂; frequency 150 MHz; guiding layer; insertion loss; near-zero temperature frequency coefficient; quartz substrate; surface skimming bulk wave device; temperature 0 degC to 120 degC; temperature characteristics; Delay lines; Insertion loss; Resists; Sensors; Substrates; Temperature; Temperature measurement; ST-90°X quartz; SU-8; Temperature characteristics;

fLanguage

English

Publisher

ieee

Conference_Titel

Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA), 2014 Symposium on

Conference_Location

Beijing

Print_ISBN

978-1-4799-6424-6

Type

conf

DOI

10.1109/SPAWDA.2014.6998607

Filename

6998607