Temperature sensor on flexible substrate patterned by laser ablation

This paper presents fabrication and characterization of flexible temperature sensor patterned by laser ablation. This work covers the preliminary study on the resistive temperature devices (RTDs) reference sensors used to measure the temperature of human body for health applications. The sensors are composed of different materials like platinum (Pt), copper (Cu) and silver (Ag) as sensitive materials. These different sensitive materials have been deposed on flexible substrate (Kapton®) by radiofrequency (RF) magnetron sputtering process and patterned by laser ablation using a femtosecond laser. The performance of the temperature sensors is evaluated and compared.