DocumentCode
1784443
Title
Planar waveguide based structures for integrated optics on PDMS
Author
Jandura, D. ; Pudis, D. ; Slabeyciusova, S. ; Durisova, J.
Author_Institution
Dept. of Phys., Univ. of Zilina, Zilina, Slovakia
fYear
2014
fDate
20-22 Oct. 2014
Firstpage
1
Lastpage
4
Abstract
In this paper, the fabrication technology for planar waveguide structures and devices in polydimethylsiloxane (PDMS) is presented. Direct laser writing was used to prepare pattern master in photoresist layer. In the next step, channel waveguide and ring resonator structures were imprinted in PDMS material. Finally, morphological properties of prepared waveguide structures were investigated by atomic force microscopy.
Keywords
atomic force microscopy; laser materials processing; optical fabrication; optical planar waveguides; optical polymers; optical resonators; photoresists; PDMS; atomic force microscopy; channel waveguide; direct laser writing; integrated optics; morphological properties; photoresist layer; planar waveguide; polydimethylsiloxane; ring resonator structures; Optical device fabrication; Optical ring resonators; Optical waveguides; Resists; Waveguide lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Devices & Microsystems (ASDAM), 2014 10th International Conference on
Conference_Location
Smolenice
Print_ISBN
978-1-4799-5474-2
Type
conf
DOI
10.1109/ASDAM.2014.6998704
Filename
6998704
Link To Document