Development of a 2-DOF micro-motion stage based on lever amplifying mechanism

This paper presents a micro planar motion stage based on flexure hinge that allows large ranges of motion along x and y direction. A new type of displacement amplifying mechanism is introduced, which is based on driving and guiding principles of flexible hinges. Not only it is able to amplify linear displacement accurately, but also it has the advantages, like high accuracy in amplifing displacement, good symmetry, no additional displacement. By means of establishing the kinematics model of the mechanism, we can understand the principle of the mechanism and the amplification ratio can be calculated accordingly. Finite element analysis (FEA) is carried out using ANSYS software to analyze all the statics of the mechanism. At last, the reason of `displacement loss´ is analyzed and clarified.