• DocumentCode
    1793462
  • Title

    Integrated single and multi-layer Si3N4 platform for ultralow loss propagation and small bending radii

  • Author

    Spencer, Daryl T. ; Heck, Martijn J. R. ; Moreira, Renan ; Bovington, Jock ; Bowers, John E. ; Leinse, Arne ; Van den Vlekkert, H.H. ; Heideman, Rene G. ; Hoekman, Marcel ; Veenstra, Theo T.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of California, Santa Barbara, Santa Barbara, CA, USA
  • fYear
    2014
  • fDate
    9-13 March 2014
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    A combination of low loss and small bend radius Si3N4 waveguide regions are integrated with one etch step. Propagation losses of 1.5 dB/m and 7 dB/m are measured with a transition loss of ≤0.5 dB/taper.
  • Keywords
    integrated optics; light propagation; optical losses; optical waveguides; silicon compounds; Si3N4; integrated single platform; multilayer platform; small bending radii; transition loss; ultra-low loss propagation; waveguide; Microwave filters; Optical filters; Optical losses; Optical ring resonators; Optical waveguides; Photonics; Propagation losses;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fiber Communications Conference and Exhibition (OFC), 2014
  • Conference_Location
    San Francisco, CA
  • Print_ISBN
    978-1-5575-2994-7
  • Type

    conf

  • DOI
    10.1364/OFC.2014.Th1A.2
  • Filename
    6886637
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1793462