Millimeter-wave antenna array on silicon with embedded cavity-backed structure

In this paper a new silicon-based antenna structure with an embedded back cavity is presented. The basic antenna with an optimized geometry has good impedance matching with return loss of -40 dB and gain of 7.6 dBi at the resonant frequency of 60 GHz. The linear arrays of four antennas with the corporate feed network have been built with three different forms of rectangular back cavity to compare its impact on the directivity and total efficiency of the antenna. As a result, the array with closed-box cavity gives the best performance with directivity of 16.51 dBi with total efficiency of -1.22 dB.