Self-assembled helical microstructures for millemeter-wave helical antennas

New microfabrication techniques allow the creation of miniaturized antennas, including for use at frequencies well beyond 60 GHz. An advantage of using microfabrication is the ability to batch-process a large quantity of antennas, which can include electrically large arrays. We report the use of a unique micro-electro-mechanical systems (MEMS) fabrication process to make helical microstructures to be used as antennas after metallization. The fabrication process enables self-assembly of planar structures into three-dimensional structures during processing. Helices with different numbers of turns, handedness, and conductor widths are fabricated from spiral structures with the self-assembly. The layout, designing and fabrication method presented here allows fabrication of arrays or even multiple elements with different design parameters, on a physically small footprint.