DocumentCode

1801157

Title

Microelectromechanical Components For Articulated Microrobots

Author

Yeh, Richard ; Kruglick, Ezekiel J J ; Pister, Kristofer S J

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

346

Lastpage

349

Keywords

Couplings; Electrostatics; Fasteners; Glass; Manipulators; Micromotors; Payloads; Robots; Substrates; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721817

Filename

721817