DocumentCode

1801236

Title

Surface-micromachined Mirrors For Laser-beam Positioning

Author

Tien, N.C. ; Solgaard, O. ; Kiang, M.H. ; Daneman, M. ; Lau, K.Y. ; Muller, R.S.

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

352

Lastpage

355

Keywords

Actuators; Laser beams; Laser theory; Mirrors; Optical beams; Optical films; Optical sensors; Optical surface waves; Substrates; Surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721819

Filename

721819