DocumentCode
1801584
Title
Verification Of The Micromechanical Characteristics Of Electrostatic Linear Actuators
Author
Kohl, M. ; Göttert, J. ; Mohr, J.
Volume
2
fYear
1995
fDate
25-29 June 1995
Firstpage
400
Lastpage
403
Keywords
Capacitors; Electrostatic actuators; Electrostatic measurements; Force measurement; Hydraulic actuators; Micromechanical devices; Mirrors; Resonance; Springs; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location
Stockholm, Sweden
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721831
Filename
721831
Link To Document