DocumentCode

1801672

Title

Design, Fabrication, And Testing Of A C-shape Actuator

Author

Lin, G. ; Kim, C.-J. ; Konishi, S. ; Fujita, H.

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

416

Lastpage

419

Keywords

Actuators; Curing; Fabrication; Gold; Internal stresses; Performance analysis; Polyimides; Temperature; Testing; Thermal expansion;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721835

Filename

721835