Preparation and characterization of multifunctional thin film sensors based on amorphous diamond-like-carbon

Author

Luthje, H. ; Biehl, S. ; Bandorf, R. ; Sick, J.-H. ; Peiner, E. ; Tibrewala, A.

Author_Institution

Fraunhofer Inst. for Surface Eng. & Thin Films, Germany

Volume

2

fYear

2005

fDate

5-9 June 2005

Firstpage

2111

Abstract

Amorphous carbon thin films also named diamond-like-carbon (DLC) are well known for their hardness, wear resistant and low friction behavior in tribological contacts. This paper deals with an additional aspect of this material, namely piezoresistivity of DLC films, which makes DLC based coatings to novel multifunctional surfaces with superior sensoric properties. DLC was prepared at low temperatures (<150°C) with piezo k-factors of some 100 to 1200. We show that this excellent coating can be prepared with optimum properties for force/pressure transducer and tribological coating as well. This allows direct measurements at mechanically treated surfaces.

Keywords

amorphous semiconductors; diamond-like carbon; force sensors; pressure sensors; semiconductor thin films; tribology; wear resistant coatings; DLC films; amorphous carbon thin films; amorphous diamond-like-carbon; direct measurements; force/pressure transducer; hardness characteristic; intelligent bearing; load sensor; low friction behavior; mechanically treated surfaces; multifunctional surfaces; multifunctional thin film sensors; piezoresistivity property; sensor washer; superior sensoric properties; tribological coating; tribological contacts; wear resistance; Amorphous materials; Coatings; Diamond-like carbon; Force sensors; Friction; Piezoresistance; Surface treatment; Temperature sensors; Thin film sensors; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1497520

Filename

1497520