A small-size, fast-settling, low-cost thermal regulator for chip surface measurements

This paper presents a thermal regulator developed to allow the electrical characterization of integrated circuits over a wide temperature range. The proposed solution is based on a Peltier cell, which is placed close to the bottom surface of the device under test (DUT) and provides the required cooling/heating power. The basic features of the proposed thermal regulator are low cost, small size, easy and accurate temperature adjustment, and fast settling time. No need exists for a thermal chamber, which allows the DUT to be characterized by means of chip surface measurements by using a microprobe station. Main measured performances include low power consumption (about 30 W in the worst case), a settling time of ∼4 min, and a temperature range adequate for most applications (-40°C to +120°C, which can be further extended by using two Peltier cells connected in series).