DocumentCode
1809811
Title
Research on low frequency miniature vector hydrophone technology based on MEMS technology
Author
Meng, Hong ; Chen, Li-jie ; Xu, Xin-ran
Author_Institution
Hangzhou Appl. Acoust. Res. Inst., Hangzhou, China
fYear
2009
fDate
17-20 Dec. 2009
Firstpage
109
Lastpage
109
Abstract
In this paper, the MEMS technique is implemented in the design and manufacture of vector hydrophone. The micromechanical structure design technique, working principle and workmanship of sensing chip in vector hydrophone are introduced. A model of double cantilever beam structure is analyzed. Based on the theoretical work, a three dimensional vector hydrophone is manufactured, and the acoustical performance of it is also tested.
Keywords
hydrophones; micromechanical devices; microsensors; vectors; MEMS technology; acoustical performance; double cantilever beam structure; micromechanical structure design technique; sensing chip; three-dimensional vector hydrophone; Acoustic sensors; Acoustic testing; Frequency; Glass; Micromechanical devices; Piezoresistance; Pulp manufacturing; Sonar equipment; Structural beams; MEMS technology; miniature sensor; piezoresistance effect; vector hydrophone;
fLanguage
English
Publisher
ieee
Conference_Titel
Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) and 2009 China Symposium on Frequency Control Technology, Joint Conference of the 2009 Symposium on
Conference_Location
Wuhan
Print_ISBN
978-1-4244-4950-7
Type
conf
DOI
10.1109/SPAWDA.2009.5428899
Filename
5428899
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