DocumentCode
1810873
Title
A Capacitive Accelerometer Using Sdb-soi Structure
Author
Matsumoto, Yoshinori ; Iwakdri, M. ; Tanaka, Hidekazu ; Ishida, Makoto ; Nakamura, Tetsuro
Volume
2
fYear
1995
fDate
25-29 June 1995
Firstpage
550
Lastpage
553
Keywords
Accelerometers; Bonding; Capacitance; Capacitive sensors; Fabrication; Micromachining; Sensor phenomena and characterization; Shape; Silicon on insulator technology; Solid state circuits;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location
Stockholm, Sweden
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721890
Filename
721890
Link To Document