DocumentCode
1810925
Title
A Novel 3-axis Monolithic Silicon Accelerometer
Author
Andersson, Gert I.
Volume
2
fYear
1995
fDate
25-29 June 1995
Firstpage
558
Lastpage
561
Keywords
Acceleration; Accelerometers; Actuators; Automotive engineering; Manufacturing industries; Manufacturing processes; Prototypes; Silicon; Solid state circuits; Structural beams;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location
Stockholm, Sweden
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721892
Filename
721892
Link To Document