DocumentCode

1810957

Title

Tri-axial Piezoelectric Accelerometer

Author

Okada, k.

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

566

Lastpage

569

Keywords

Acceleration; Accelerometers; Capacitance; Control systems; Electrostatics; Glass; Micromachining; Piezoresistance; Space technology; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721894

Filename

721894