DocumentCode

1811086

Title

A Laterally Driven Micromachined Resonant Pressure Sensor

Author

Welham, Christopher J. ; Gardne, Julian W. ; Greenwood, John

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

586

Lastpage

589

Keywords

Boron; Capacitive sensors; Etching; Force sensors; Frequency; Micromachining; Q factor; Resonance; Sensor phenomena and characterization; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721899

Filename

721899