DocumentCode

1811531

Title

An Inertial-Grade, Micromachined Vibrating Beam Accelerometer

Author

Roszhart, Terry V. ; Jerman, Hal ; Drake, Jeo ; de Cotiis, C.

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

656

Lastpage

658

Keywords

Acceleration; Accelerometers; Anisotropic magnetoresistance; Assembly; Etching; Fasteners; Frequency; Glass; Silicon; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721917

Filename

721917