• DocumentCode
    1811562
  • Title

    A Novel Accelerometer Using Silicon Micromachined Cantilever Supported Optical Grid And Pin Protodetector

  • Author

    Huang, Ruey Shing ; Abbaspour-Sani, Ebrahim ; Kwok, Chee Yee

  • Volume
    2
  • fYear
    1995
  • fDate
    25-29 June 1995
  • Firstpage
    663
  • Lastpage
    666
  • Keywords
    Acceleration; Accelerometers; Etching; Geometrical optics; Light emitting diodes; Nonlinear optics; Optical sensors; Photodetectors; Silicon; Strips;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
  • Conference_Location
    Stockholm, Sweden
  • Print_ISBN
    91-630-3473-5
  • Type

    conf

  • DOI
    10.1109/SENSOR.1995.721919
  • Filename
    721919
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1811562