High throughput capability of a microfabricated hollow probe for near field microscopy in ultraviolet region

Summary form only given. For realizing high sensitivity in high spatially resolved spectroscopy in ultraviolet (UV) region, we demonstrate here high throughput capability of a hollow probe fabricated by the transfer mold technique in a pyramidal silicon groove. In comparison with the conventional fiber probe, the advantages of such a probe are: 1. Hollow structure leads to no optical absorption in the UV region inside the probe, which results in high throughput. 2. Hollow structure leads to no luminescence in the UV region inside the probe, which results in high signal to noise ratio in the illumination-mode near field spectroscopy.