DocumentCode
1817928
Title
Electrical Doping Of Gassensitive, Semiconducting Ga/sub2/O/sub3/ Thin Films
Author
Frank, J. ; Fleischer, M. ; Meixner, H.
Volume
2
fYear
1995
fDate
25-29 June 1995
Firstpage
850
Lastpage
853
Keywords
Conducting materials; Conductivity; Crystallization; Gas detectors; Semiconductivity; Semiconductor device doping; Semiconductor thin films; Sputtering; Temperature sensors; Thin film sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location
Stockholm, Sweden
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721972
Filename
721972
Link To Document