DocumentCode
1818432
Title
A new design based on electro-thermally actuation for an SU-8 microgripper
Author
Voicu, Rodica ; Muller, Raluca ; Eftime, Laura
Author_Institution
Nat. Inst. for R&D in Microtechnologies, IMT-Bucharest, Bucharest
Volume
1
fYear
2008
fDate
13-15 Oct. 2008
Firstpage
205
Lastpage
208
Abstract
A new design for a polymeric microgripper was developed. Two microgripper with different dimensions were considered. An evaluation between these models was performed using the simulation results. Finite-element analyses of the microgripper, using COVENTORWARE, are performed in order to evaluate the relation between the displacement, temperatures and the electrical current passing through the metallic layers.
Keywords
finite element analysis; grippers; micromanipulators; polymers; SU-8 microgripper; electrical current; electro-thermally actuation; finite-element analyses; metallic layers; polymeric microgripper; Actuators; Application software; Arm; Computer simulation; Finite element methods; Gold; Grippers; Performance evaluation; Polymers; Temperature; SU-8 polymer; electro-thermal actuator; microgripper; micromanipulation;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2008. CAS 2008. International
Conference_Location
Sinaia
ISSN
1545-827X
Print_ISBN
978-1-4244-2004-9
Type
conf
DOI
10.1109/SMICND.2008.4703369
Filename
4703369
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