DocumentCode
1824391
Title
A current density analysis tool to identify BEOL fails under ESD stress
Author
Mitra, Souvick ; Palmer, Nicholas ; Gauthier, Robert ; Muhammad, Mujahid ; Halbach, Ralph ; Seguin, Chris
Author_Institution
Microelectron., Semicond. R&D Center, IBM, Essex Junction, VT, USA
fYear
2011
fDate
11-16 Sept. 2011
Firstpage
1
Lastpage
6
Abstract
BEOL Metal structures were characterized for defining ESD current handling capability, once a failure criterion is established; a current density analysis tool is used to simulate the results. The current density tool can identify metal fails for simple structures and needs update for complex current path. The tool is important for a designer to verify and update any weak path that may degrade the design.
Keywords
current density; electrostatic discharge; failure analysis; BEOL metal structures; ESD stress; complex current path; current density analysis tool; failure criterion; Current density; Electrostatic discharge; Fingers; Integrated circuit interconnections; Metals; Resistance; Shape;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2011 33rd
Conference_Location
Anaheim, CA
ISSN
Pending
Electronic_ISBN
Pending
Type
conf
Filename
6045603
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