Investigations into the use of SU-8 in the fabrication of a micro-optical bench for hybrid optoelectronic integration and packaging

Author

Farrington, Novak E S ; Iezekiel, Stavros

Author_Institution

Inst. of Microwaves & Photonics, Leeds Univ., UK

fYear

2001

fDate

2001

Firstpage

164

Lastpage

167

Abstract

The ultrathick negative photoresist SU-8 has been investigated for use in the fabrication of a passively aligning micro-optical suite including elements such as fibre alignment grooves, lens holders and device alignment features. The possibility for the fabrication of mirrors is also considered. The excellent micromachining properties of SU-8 using common low-cost, fast photolithographical techniques with processing temperatures of below 100°C make it an ideal material for the rapid, cost-effective prototyping of the above structures. A fibre-lens alignment structure has been fabricated and its accuracy evaluated

Keywords

micro-optics; micromachining; optical fabrication; packaging; photoresists; 100 C; SU-8; device alignment; fabrication; fibre alignment groove; fibre-lens alignment; hybrid optoelectronic integration; lens holder; micro-optical bench; micromachining; mirror; packaging; passive alignment; photolithogaphical technique; prototyping; ultrathick negative photoresist; Micromachining; Mirrors; Optical device fabrication; Optical fiber devices; Optical films; Packaging; Prototypes; Resists; Solvents; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

High Frequency Postgraduate Student Colloquium, 2001. 6th IEEE

Conference_Location

Cardiff

Print_ISBN

0-7803-7118-6

Type

conf

DOI

10.1109/HFPSC.2001.962192

Filename

962192