Integration of low profile neural probe array with flexible polyimide cable

In this work, an integration method of low profile probe array system is proposed for minimizing the tissue trauma after implantation. The planar neural probes was assembled with a Si platform to form a 3D probe array, which is then connected to the application-specific integrated circuit (ASIC) chip with a flexible polyimide cable by flip-chip bonding to complete the whole integration. The probe array and flexible polyimide cable have undergone electrical tests to prove to be highly stable and reliable. With the specially designed components, flexible assembly is achieved. The proposed integration method achieved a low profile of the probe array and the requirements for its applications. The impedance of the assembled probe electrode in artificial cerebrospinal fluid (aCSF) is measured to be about 1.1 MΩ at 1kHz.