Polyimide film based RF MEMS capacitive switches

Author

Ramadoss, R. ; Lee, S. ; Bright, V.M. ; Lee, Y.C. ; Gupta, K.C.

Author_Institution

Dept. of Electr. & Comput. Eng., Colorado Univ., Boulder, CO, USA

Volume

2

fYear

2002

fDate

2-7 June 2002

Firstpage

1233

Abstract

A new type of RF MEMS capacitive switch using polyimide film as the structural membrane layer has been developed. The dimensions of these switches range from a few hundred microns to a few millimeters and are convenient for integration with printed antennas. Fabrication and assembly of the polyimide film based switches are discussed. Electromechanical switch designs with actuation voltages as low as 73 V are presented. RF performance of the shunt-mounted switches on a CPW line has been demonstrated in the L-band with an insertion loss of less than 0.32 dB.

Keywords

UHF devices; coplanar waveguides; electrostatic actuators; membranes; microassembling; microwave switches; polymer films; 0.32 dB; 73 V; CPW line; L-band operation; RF MEMS capacitive switch; RF performance; actuation voltages; insertion loss; microelectromechanical switch; polyimide film based MEMS switches; polyimide structural membrane layer; printed antenna integration; shunt-mounted switches; switch assembly; switch fabrication; Assembly; Biomembranes; Coplanar waveguides; Fabrication; Low voltage; Performance loss; Polyimides; Radio frequency; Radiofrequency microelectromechanical systems; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 2002 IEEE MTT-S International

Conference_Location

Seattle, WA, USA

ISSN

0149-645X

Print_ISBN

0-7803-7239-5

Type

conf

DOI

10.1109/MWSYM.2002.1011882

Filename

1011882