DocumentCode
1838350
Title
An automatic monitor management system for effective 300 mm fab operations
Author
Wu, Chung-Shen ; Liao, Da-Yin
Author_Institution
Taiwan Semicond. Manuf. Co., Taiwan
fYear
2001
fDate
2001
Firstpage
99
Lastpage
102
Abstract
This paper presents an effective monitor operations automation system (MOAS) which is being developed for automatic monitor management in a 300 mm mass production fab in tsmc. Continuing the previous study of on 300 mm monitor automation, it is implemented by integrating with advanced 300 mm CIM systems as well as functions. MOAS demonstrates its capability as a key driver to realize the automation of complex fab monitor operations
Keywords
computer integrated manufacturing; computerised monitoring; integrated circuit manufacture; process monitoring; 300 mm; 300 mm mass production fab; CIM systems; IC production; automatic monitor management system; semiconductor manufacture; Computer integrated manufacturing; Computerized monitoring; Fabrication; Manufacturing automation; Manufacturing processes; Mass production; Pulp manufacturing; Robust control; Semiconductor device manufacture; Semiconductor device reliability;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing Symposium, 2001 IEEE International
Conference_Location
San Jose, CA
Print_ISBN
0-7803-6731-6
Type
conf
DOI
10.1109/ISSM.2001.962924
Filename
962924
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