• DocumentCode
    1840349
  • Title

    Comparing room ionization technologies in FPD manufacturing

  • Author

    Yoo, Joshua ; Kim, Dongsun ; Ho, WonJoon ; Jeong, Ju Yung ; Park, Byeong Hoo ; Steinman, Arnold

  • Author_Institution
    CORE INSIGHT, Seongnam, South Korea
  • fYear
    2012
  • fDate
    9-14 Sept. 2012
  • Firstpage
    1
  • Lastpage
    6
  • Abstract
    In Flat Panel Display (FPD) manufacturing, automated handling charges both sides of the glass panels. Conventional ionization technology has a limited effect for ESD and particle contamination control as most of the ionizing bars are put over the top of the glass panels. But the glass has also been charged on the bottom of the panel, and as the glass gets bigger and panel transportation speeds increase, higher residual charges cause more damaging ESD Events and attract more particles. This paper examines the physical factors that have changed in FPD manufacturing and proposes alternative room ionization technology to improve ESD and particle control.
  • Keywords
    contamination; electrostatic discharge; flat panel displays; ionisation; manufacturing processes; ESD events; FPD manufacturing; flat panel display manufacturing; glass panels; ionizing bars; particle contamination control; room ionization technology; Capacitance; Coatings; Contamination; Electrostatic discharges; Glass; Ionization; Pollution measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2012 34th
  • Conference_Location
    Tucson, AZ
  • ISSN
    0739-5159
  • Print_ISBN
    978-1-4673-1467-1
  • Type

    conf

  • Filename
    6333293