DocumentCode
1840349
Title
Comparing room ionization technologies in FPD manufacturing
Author
Yoo, Joshua ; Kim, Dongsun ; Ho, WonJoon ; Jeong, Ju Yung ; Park, Byeong Hoo ; Steinman, Arnold
Author_Institution
CORE INSIGHT, Seongnam, South Korea
fYear
2012
fDate
9-14 Sept. 2012
Firstpage
1
Lastpage
6
Abstract
In Flat Panel Display (FPD) manufacturing, automated handling charges both sides of the glass panels. Conventional ionization technology has a limited effect for ESD and particle contamination control as most of the ionizing bars are put over the top of the glass panels. But the glass has also been charged on the bottom of the panel, and as the glass gets bigger and panel transportation speeds increase, higher residual charges cause more damaging ESD Events and attract more particles. This paper examines the physical factors that have changed in FPD manufacturing and proposes alternative room ionization technology to improve ESD and particle control.
Keywords
contamination; electrostatic discharge; flat panel displays; ionisation; manufacturing processes; ESD events; FPD manufacturing; flat panel display manufacturing; glass panels; ionizing bars; particle contamination control; room ionization technology; Capacitance; Coatings; Contamination; Electrostatic discharges; Glass; Ionization; Pollution measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2012 34th
Conference_Location
Tucson, AZ
ISSN
0739-5159
Print_ISBN
978-1-4673-1467-1
Type
conf
Filename
6333293
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