DocumentCode
1840775
Title
A μ-TLP system realized in MEMS technology
Author
Tazzoli, Augusto ; Giovampaola, Cristian Della
Author_Institution
Dept. of Electr. & Syst. Eng., Univ. of Pennsylvania, Philadelphia, PA, USA
fYear
2012
fDate
9-14 Sept. 2012
Firstpage
1
Lastpage
8
Abstract
This work reports on a fully integrated μ-TLP system realized in MEMS technology. The proposed solution shows exceptionally low parasitics, and generates very fast pulses with fast rise times and high repetition rate. This system can be used for the testing of very sensitive devices, like MR heads or MEMS/NEMS.
Keywords
electrostatic discharge; micromechanical devices; transmission lines; ESD; MEMS technology; MEMS-NEMS; MR heads; fully integrated μ-TLP system; transmission line pulser system; very sensitive devices; Conductors; Coplanar waveguides; Optical switches; Power transmission lines; Resistors; Transmission line measurements;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2012 34th
Conference_Location
Tucson, AZ
ISSN
0739-5159
Print_ISBN
978-1-4673-1467-1
Type
conf
Filename
6333310
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