Contactless probing of high-frequency electrical signals with scanning probe microscopy

Author

Merlin, W.

Author_Institution

Inst. of Mater. for Electr. Eng., Gerhard Mercator Univ., Duisburg, Germany

Volume

3

fYear

2002

fDate

2-7 June 2002

Firstpage

1493

Abstract

Circuit internal test techniques working in a contactless manner are necessary for failure analysis and design verification of high-speed and high-frequency circuits. A relative new technique is the scanning probe voltage measurement technique, a technique which is based on scanning probe microscopy. This paper gives an overview of the state-of-the-art of this technique and demonstrates some practical examples.

Keywords

MMIC; failure analysis; high-speed integrated circuits; high-speed techniques; integrated circuit design; integrated circuit testing; scanning probe microscopy; test equipment; voltage measurement; circuit internal test techniques; contactless probing; design verification; digital patterns; failure analysis; harmonic signals; high-frequency circuits; high-frequency electrical signals; high-speed circuits; scanning probe microscopy; scanning probe voltage measurement; Circuit testing; Contacts; Digital integrated circuits; Force measurement; Frequency; Integrated circuit testing; MMICs; Scanning probe microscopy; Spatial resolution; Voltage measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 2002 IEEE MTT-S International

Conference_Location

Seattle, WA, USA

ISSN

0149-645X

Print_ISBN

0-7803-7239-5

Type

conf

DOI

10.1109/MWSYM.2002.1012138

Filename

1012138