LZY: A Self-Calibration Approach in Competition to the LRM Method for On-Wafer Measurements

The theory and measurement results of the LZY self-calibration procedure are presented. The LZY method is specifically designed for measurements on planar structures. The self-calibration part determines the propagation constant of the line-standard and the impedance value of the ground-connection of the impedance standard. This LZY procedure deals with only two standards. The fact, that it is not necessary to know completely both standards, allows to create calibration standards in an easy way and allows to perform a self-control after the calibration process. This LZY self-calibration procedure is based on closed solutions, so that the accuracies and viabilities are very good, as proved by measurements.